Oxygen vacancies Irradiation Microstructure physique Epitaxy FTIR Electron paramagnetic resonance Hafnium silicate Doping Matériaux hybrides Hafnium silicates Couches minces Films Pulvérisation cathodique Silicon nitride Electroluminescence Computational electromagnetic methods Refractive index MoS2 Neodymium High-k dielectrics Quantum-well Liposomes Silicon nanoclusters Silicon nanocrystals XRD Nanostructure IR spectroscopy Friction Silicium Down-conversion Thin films M-lines Grazing incidence X-ray diffraction Erbium Multilayers Oxides PZT Photoluminescence Optical properties Magnetron sputtering Photovoltaic Phase transition Atom probe tomography Rare-earth ions Hillocks Microstructure physics Rare earth Semiconductors SiC Nanoparticules Feature erasure HR STEM-HAADF GENOMIQUE Guide d'onde Cerium CoMoS Rare-earth- doped materials Cathodoluminescence Raman scattering Al2O3 Oxide materials ADE-FDTD Rare-earth Lifetime Si nanocluster Reactive magnetron sputtering Infrared absorption Optical amplifiers Structural properties Microstructure Fluorescence Nanostructuring Pulvérisation magnétron radiofréquence Couches minces semi-conductrices Citric acid Si-rich silicon oxide RF magnetron sputtering Copper Sputtering AFM Raman Nanostructures Oxide interface Waveguides Silicon photonics Nanostructured materials Silicon Rare earths Crystal structure Waveguide Luminescence Terres rares CO adsorption Radiofrequency magnetron sputtering Nanoparticles Energy transfer Conductivity Terbium Thin film Laser pyrolysis